Rough vacuum chamber (1x10-2 Torr) is used to heat up semiconducting samples by joule heating, while measuring electrical properties by the 4 point probe method and optical methods (THz and Spectrometry). Wafers of dimensions up to 80x25 mm can be used as samples. Crucially the chamber is placed in bld. 340 G.9.2 and offers the possibility to collaborate with DTU Photonics.
Model number: VacCham 3000 (Built in-house).
Time in service: since September 2019.
Keywords: rough vacuum, joule heating, semiconductors.