- Imina Probe Station Overview
The IMINA probe station is designed for semi-automated electrical characterization of micron-scale electrical components on substrates ranging from chips to 4” wafers. There are four individually controllable miBot probe carriers that allow for precise probe placement with simple switching between contacts, eliminating the need for ultrasonic bonding. The system comes with Precisio™ software which allows for precise stage control, parameterizing options for the miBots and camera-assisted view. The miBots are compatible with most measuring equipment through BNC connectors, with Keithleys 2400 and 4200 being available to the current system.
- Robotic controllable probes
- 4 degrees of freedom
- Positioning resolution*
- Stepping: 50 nm (X, Y), 120 nm (Z)
- Scanning: 1.5 nm (X,Y), 3.5 nm (Z)
- Motion range*
- Stepping**: X,Y: typ. 5 cm: R: ± 180°; Z: 42° (arm rotation)
- Scanning: X: 440 nm; Y: 250 nm; Z: 780 nm
- Up to 6 probes
- Tungsten (W) tips with 500 nm radius
*Specifications are measured at tool-holder tip (label “THT” on shema) and measured at 300 K. All technical specifications are approximate values.
**In stepping, actual motion range in X, Y, R are limited by the size and shape of the stage where the miBot moves, and the length of the driving cable.