Sputtering chamber

Polyteknik/TSST magnetron sputtering chamber

Sputtering chamber connected in-situ with the vacuum transferline and fully compatible with standard TSST heater stages (substrate holders). The chamber is equipped with 6 cathodes for on-axis deposition using DC or RF power supplies.

Location: B310, basement (surface lab)

Responsible: Felix Trier

Contact

Felix Trier
Senior Researcher
DTU Energy
+45 22 92 46 10